Influencing factors of energy efficient operation of clean air conditioning systems in chip workshops

Based on the operating characteristics of the clean air conditioning systems in the chip workshops, the energy consumption influencing factors of the clean air conditioning systems in the chip workshops are obtained through theoretical analysis, and the energy consumption status and energy saving potential of the clean air conditioning systems in the chip workshops are combed through actual measurement. The simulation results of DesignBuilder software show that the maximum energy saving rates of air conditioning power consumption of chiller COP, air change rate, fan efficiency, outdoor air rate, pump efficiency and indoor design temperature are 39.7%, 23.0%, 15.4%, 11.2%, 10.8% and 6.0% respectively. SPSS partial correlation analysis shows that the significant influencing factors are chiller COP, air change rate and outdoor air rate. The research results can provide a basis for the prediction of expected energy saving.